Capacitance Gauges -- ARD 2000 Series Pressure Transmitters Data Sheets Alcatel Vacuum Products, Inc.

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Capacitance Gauges -- ARD 2000 Series

SPECIFICATIONS

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Signal Output	Analog Voltage; Switch
Sensor Technology	Mechanical Deflection; Utilizes MEMS; Variable Capacitance; Capacitance Manometer
Pressure Measurement	Absolute; Vacuum
Working Pressure Range (psi)	1.45E-6 to 14.50
Vacuum Range (torr)	750 to 7.50E-5
Notes	Accurate, micromachined silicon diaphragm, pushbutton zero

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