With the new ATH300, Alcatel Vacuum Technology now offers a complete range of hybrid turbomolecular pumps from 30 l/s to 300 l/s.

• ATH31 (standard, +, C)
• ATH200 (standard, I)
• ATH300 (standard, CI)

The ATH300 is available in two versions: the standard version for non-corrosive applications and the Ci version for pumping corrosive gases with a flexible intermediate pumping port. Additionally, a powerful motor allows the pump to operate with an inlet pressure up to 0.1 mbar (70 mTorr). Design features also make the pump attractive for direct integration in an analytical instrument.

The pump has already gained great interest for large nuclear physics experiments and for industrial applications such as sputtering, ion bombardment and other techniques.