ATH-M Series 4 pumps designed for semiconductor processes The ATH-M series are hybrid magnetically leviated turbo pumps. These very sophisticated high performance and extremely robust pumps are recognized as the new reference in the world of large turbomolecular pumps. Models ATH400M, ATH1300M, ATH1600M, ATH2300M, ATH2800M and ATH3200M Features
- Magnetically levitated hybrid turbomolecular pumps
- High throughput at high inlet pressure
- Resistant against powder, particles and shock
- Active five axis control
- Automatic balancing system
- Adjustable rotational speed
- Rack or pump mounted controller options
- Heated and non-heated versions
Benefits
- No mechanical contact, friction or wear
- No scheduled bearing maintenance
- High exhaust pressure tolerance
- High MTBF
- Low cost of ownership
- Battery free
- Pump mounted controller saves space and requires no cables
- Profibus DP, discrete I/O, RS232/485 or DeviceNet, on select models
Applications
- Glass Coating
- PV manufacturing
- Micro machining systems
- Thin Film production
- Sputtering
- Electron microscopy
- Particle accelerators
- Ion milling
- R&D
Visit adixen by Alcatel Vacuum Technology for more product details or call 781-331-4200.
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